Ke. Andreev et al., MAGNETIC-FIELD MAPS OF YBCO THIN-FILMS OBTAINED BY SCANNING SQUID MICROSCOPY FOR HTSC MICROELECTRONICS, Superconductor science and technology, 10(5), 1997, pp. 366-370
Scanning SQUID microscopy has been extended to record current-induced
magnetic field maps of superconductor topologies based on YBCO film st
ructures. The technique described can be used as a powerful tool for t
he diagnostics of superconductor integrated circuits and highly sensit
ive bolometers. This kind of diagnostics predicts the degree of integr
ation which can be achieved at the modern level of HTSC microelectroni
cs technology, One would expect an overall yield of 100-element 1 mm(2
) chips at a level of similar to 0.1-0.5% in the production of superco
nducting YBCO/MgO bolometers.