AUTOMATIC CONTACT-FREE PROFILOMETER FOR MONITORING SURFACES OF POLYGRAPHIC MASTER PLATES

Authors
YAMNIKOV LS
Citation
Ls. Yamnikov, AUTOMATIC CONTACT-FREE PROFILOMETER FOR MONITORING SURFACES OF POLYGRAPHIC MASTER PLATES, Measurement techniques, 40(10), 1997, pp. 938-939
Citations number
NO
Journal title
Measurement techniques → ACNP
ISSN journal
05431972
Volume
40
Issue
10
Year of publication
1997
Pages
938 - 939
Database
ISI
SICI code
0543-1972(1997)40:10<938:ACPFMS>2.0.ZU;2-#
Abstract
We describe a interference profilometer using defocussing over the max imum width of a groove and amplitude-phase analysis of the reflected l ight.