A circular arrayed sensor which integrates a number of linear capillar
ies and enzyme immobilized platinum electrodes on a silicon wafer has
been developed. This sensor device has no need of other electrical or
mechanical devices, because the sample solution is introduced by capil
lary action. The sensor was fabricated using silicon semiconductor tec
hnology, allowing mass production of a miniature sensor. Each linear u
nit is a self-contained device. Glucose solution is drawn into a capil
lary by surface tension, reacts with immobilized glucose oxidase and p
roduces hydrogen peroxide (H2O2). The electrochemical signal due to th
e oxidation of H2O2 is measured using a sputtered platinum electrode.
This sensor device is capable of measuring glucose concentration rangi
ng from 10 to 200 mM.