TEMPERATURE UNIFORMITY IN RTP USING MIMO ADAPTIVE-CONTROL

In this paper the problem of temperature uniformity in Rapid thermal p rocessing is addressed by means of multivariable adaptive control. A m ultivariable linear discrete time CARIMA model of the highly non-linea r process is identified on-line using a supervised identification sche ma. The control law is based on the minimization of an infinite time l inear quadratic cost function with a partial state reference model. Th is reference model allows to incorporate an appropriate tracking capab ility into the linear quadratic control law. Experimental results of t he application of the involved MIMO adaptive controller on a RTP syste m are presented. (C) 1998 John Wiley & Sons, Ltd.