ABSOLUTE SPHERICITY MEASUREMENT - A COMPARATIVE-STUDY OF THE USE OF INTERFEROMETRY AND A SHACK-HARTMANN SENSOR

Authors
PFUND J LINDLEIN N SCHWIDER J BUROW R BLUMEL T ELSSNER KE
Citation
J. Pfund et al., ABSOLUTE SPHERICITY MEASUREMENT - A COMPARATIVE-STUDY OF THE USE OF INTERFEROMETRY AND A SHACK-HARTMANN SENSOR, Optics letters, 23(10), 1998, pp. 742-744
Citations number
5
Categorie Soggetti
Optics
Journal title
Optics letters → ACNP
ISSN journal
01469592
Volume
23
Issue
10
Year of publication
1998
Pages
742 - 744
Database
ISI
SICI code
0146-9592(1998)23:10<742:ASM-AC>2.0.ZU;2-P
Abstract
A comparison of absolute sphericity measurements with a Shack-Hartmann sensor and a Twyman-Green interferometer is presented. The absolute d eviations of a test sphere from its ideal shape were calculated in bot h cases from the measured wave aberrations of three different position s. Very good qualitative and quantitative agreement of the results was achieved. The difference of the root-mean-square values of the two me thods was 1/1000 of a wavelength. (C) 1998 Optical Society of America.