HIGH-RESOLUTION X-RAY-DIFFRACTION AND REFLECTIVITY STUDIES OF VERTICAL AND LATERAL ORDERING IN MULTIPLE SELF-ORGANIZED INGAAS QUANTUM DOTS

We have investigated multiple layers of self-assembled InGaAs quantum dots by high-resolution X-ray diffraction reciprocal space mapping and reflectivity. An anisotropy in the dot spacing was found, which prove s an ordering of the islands in a disordered two-dimensional square la ttice with main axes parallel to the [100] direction and a lateral lat tice parameter of 55 nm. Vertical correlations in the dot multilayers were investigated nondestructively in the regime of total external ref lection of X-rays.