ANALYSIS OF LOCAL LATTICE STRAINS AROUND PLATE-LIKE OXYGEN PRECIPITATES IN CZOCHRALSKI-SILICON WAFERS BY CONVERGENT-BEAM ELECTRON-DIFFRACTION

Authors
OKUYAMA T NAKAYAMA M SADAMITSU S NAKASHIMA J TOMOKIYO Y
Citation
T. Okuyama et al., ANALYSIS OF LOCAL LATTICE STRAINS AROUND PLATE-LIKE OXYGEN PRECIPITATES IN CZOCHRALSKI-SILICON WAFERS BY CONVERGENT-BEAM ELECTRON-DIFFRACTION, JPN J A P 1, 36(6A), 1997, pp. 3359-3365
Citations number
21
Journal title
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS → ACNP
Volume
36
Issue
6A
Year of publication
1997
Pages
3359 - 3365
Database
ISI
SICI code
Abstract
Convergent-beam electron diffraction (CBED) is used to study lattice s train around plate-like oxygen precipitates in Czochralski (CZ)-grown silicon. Local lattice strain determined from higher-order Laue zone ( HOLZ) patterns shows that compressive and tensile stress fields exist near the precipitates. The spatial variation of local lattice strain a nd lattice rotation is visualized in a defocused large angle CBED disc , or a convergent-beam imaging (CBIM) disc.