CARBONACEOUS PHASES BY IR LASER-INDUCED DECOMPOSITION OF 3-BUTYN-2-ONE

Authors
DRINEK V URBANOVA M BASTL Z GREGORA I VORLICEK V SUBRT J POLA J
Citation
V. Drinek et al., CARBONACEOUS PHASES BY IR LASER-INDUCED DECOMPOSITION OF 3-BUTYN-2-ONE, Applied physics A: Materials science & processing, 66(5), 1998, pp. 503-509
Citations number
27
Categorie Soggetti
Physics, Applied
Journal title
Applied physics A: Materials science & processing → ACNP
ISSN journal
09478396
Volume
66
Issue
5
Year of publication
1998
Pages
503 - 509
Database
ISI
SICI code
0947-8396(1998)66:5<503:CPBILD>2.0.ZU;2-D
Abstract
Decomposition of 3-butyn-2-one induced by CO2 laser radiation in the g as phase results in the deposition of carbonaceous films composed of a graphitic and monohydrogenated carbon, in which H is dominantly bende d to sp(3) sites. The films incorporate oxygen in the topmost layers. The technique is suitable for the preparation of thin C-based films at low substrate temperatures.