AREA-SELECTIVE NUCLEATION OF COPPER ON FLUOROCARBON-RESIN SURFACE USING ARF EXCIMER LASER-INDUCED CHEMICAL MODIFICATION

Area-selective nucleation of copper onto fluorocarbon-resin surface wa s demonstrated by using an ArF excimer laser and copper-sulfate (CuSO4 ) aqueous solution. Pyramid-typed shaped nuclei of copper were initial ly formed on even an inert surface of fluorocarbon-resin in the same w ay as semiconductor or metal surfaces. Interface of copper nuclei and fluorocarbon-resin was chemically bonded through oxygen which was phot odissociated from water in copper-sulfate aqueous solution under ArF e xcimer laser irradiation. The modification cannot be successful withou t our previous defluorination efforts using ArF excimer laser-induced chemical reaction. (C) 1998 American Institute of Physics.