M. Okoshi et M. Murahara, AREA-SELECTIVE NUCLEATION OF COPPER ON FLUOROCARBON-RESIN SURFACE USING ARF EXCIMER LASER-INDUCED CHEMICAL MODIFICATION, Applied physics letters, 72(20), 1998, pp. 2616-2618
Area-selective nucleation of copper onto fluorocarbon-resin surface wa
s demonstrated by using an ArF excimer laser and copper-sulfate (CuSO4
) aqueous solution. Pyramid-typed shaped nuclei of copper were initial
ly formed on even an inert surface of fluorocarbon-resin in the same w
ay as semiconductor or metal surfaces. Interface of copper nuclei and
fluorocarbon-resin was chemically bonded through oxygen which was phot
odissociated from water in copper-sulfate aqueous solution under ArF e
xcimer laser irradiation. The modification cannot be successful withou
t our previous defluorination efforts using ArF excimer laser-induced
chemical reaction. (C) 1998 American Institute of Physics.