MORPHOLOGY OF CORROSION PITS IN ALUMINUM THIN-FILM METALLIZATIONS

Authors
PROOST J BAKLANOV M VERBEECK R MAEX K
Citation
J. Proost et al., MORPHOLOGY OF CORROSION PITS IN ALUMINUM THIN-FILM METALLIZATIONS, JOURNAL OF SOLID STATE ELECTROCHEMISTRY, 2(3), 1998, pp. 150-155
Citations number
15
Categorie Soggetti
Electrochemistry
Journal title
JOURNAL OF SOLID STATE ELECTROCHEMISTRY → ACNP
ISSN journal
14328488
Volume
2
Issue
3
Year of publication
1998
Pages
150 - 155
Database
ISI
SICI code
1432-8488(1998)2:3<150:MOCPIA>2.0.ZU;2-X
Abstract
The morphology of corrosion pits in sputtered pure aluminum and Al(0.5 wt% Cu) thin film metallizations has been investigated for a diluted chloride solution. The observed fractal-like patterns show clearly dis tinct features in ramification and branch density, which can be attrib uted to microscopic inhomogeneities inside the aluminum film. It is di scussed how these observations may have an impact on the current descr iption of diffusion phenomena in thin films, e.g. concerning electromi gration.