H. Buchenau et al., ARSENIC BEAM FROM A MBE SOURCE CHARACTERIZED BY FEMTOSECOND LASER SPECTROSCOPY, Applied physics. B, Lasers and optics, 66(5), 1998, pp. 613-616
We present measurements allowing a characterization of arsenic beams f
rom commercial molecular beam epitaxy (MBE) sources. A combination of
multiphoton ionization with fs laser pulses and time-of-flight mass sp
ectrometry allows a determination to be made of the size distribution
of neutral particles in the arsenic beam. We find that arsenic tetrame
rs As-4 are the constituents of a molecular beam. Of importance are pa
rameters such as laser intensity, pulse duration, and laser wavelength
for a quantitative characterization and thereby improvement of MBE so
urces. This would help to optimize the epitaxial growth process. We de
monstrate that nonresonant multiphoton ionization (MPI) by fs laser pu
lses leads to detection of the parent molecule, whereas nonresonant MP
I with ns laser pulses leads to strong fragmentation.