Ra. Kleijhorst et al., MICROMACHINING WORKSTATION FOR A DIODE-PUMPED ND-YAG HIGH-BRIGHTNESS LASER SYSTEM, Review of scientific instruments, 69(5), 1998, pp. 2118-2119
Nd:YAG micro-machining workstation that allows cutting on a scale of a
few microns has been developed and operated. The system incorporates
a telescope viewing system that allows control during the work and a s
oftware interface to translate AutoCad files. Some examples of the per
formance are given. With this setup we demonstrate the possibility of
machining within a few microns with a Nd:YAG laser. (C) 1998 American
Institute of Physics.