INDUCTIVE ELECTRON HEATING REVISITED

The induced of magnetic fields of low-frequency inductively coupled pl asmas are measured and modeled [M, Tuszewski, Phys. Rev. Lett. 77, 128 6 (1996)]. The fields penetrate deep into the discharges, in contrast with existing predictions of field decay within a thin skin layer. Flu id calculations suggest that the enhanced of penetration is due to a r eduction of the plasma conductivity by the induced magnetic fields. In this paper, new oxygen and argon data concerning of power are reporte d and a general description of inductive electron heating is suggested . (C) 1997 American Institute of Physics.