APPLICATIONS OF PULSED EXCIMER-LASER DEPOSITION WITH A FROZEN NITROGEN TARGET TO DEPOSITION OF NBN AND BN FILMS

NbN and/or BN films were deposited by pulsed laser deposition (PLD) wi th a frozen nitrogen target. novel method makes it possible to prepare active nitrogen species such as atomic nitrogen and it is expected to be useful for synthesis of nitride films. The usefulness of this meth od is confirmed by comparison with films formed by conventional ambien t-controlled PLD. The deposited films were characterized by)C-ray diff raction measurements, X-ray photoelectron spectroscopy (XPS) and Fouri er transform infra-red (FT-IR) absorption spectroscopy. It was confirm ed that tile concentration of nitrogen in the films fabricated by PLD with a frozen nitrogen target increases and the nitriding process is e nhanced.