K. Yamamoto et al., OPTICAL CONFINEMENT EFFECT FOR BELOW 5 MU-M THIN-FILM POLY-SI SOLAR-CELL ON GLASS SUBSTRATE, JPN J A P 2, 36(5A), 1997, pp. 569-572
The optical confinement effect of a thin film poly-Si solar cell on a
glass substrate fabricated by plasma chemical vapor deposition (CVD) a
t low temperature has been investigated for a cell thickness of less t
han 5 mu m. The structure of the cell is glass/back reflector/n-i-p po
ly-Si/ITO/Ag grid. The cell with a thickness of 3.5 mu m demonstrated
an intrinsic efficiency of 9.8%, as independently confirmed by Japan Q
uality Assurance. The cell is well characterized by the structure of n
aturally surface texture and enhanced absorption with a back reflector
(STAR). The optical confinement effect of the cell with STAR structur
e explains both the excellent high short circuit current density of ab
ove 27 mA/cm(2) for the 4.7 mu m thick cell and the markedly high quan
tum efficiency at long wavelength as determined through PClD analysis.