PHYSICAL AND MECHANICAL-PROPERTIES OF TI1-XSIXN FILMS

Ti1-xSixN coatings with 0<x<0.30 and thicknesses ranging from 1.2 to 3 .3 mu m, were deposited on to polished high-speed steel substrates by r.f. reactive magnetron sputtering. The atomic composition of the samp les was measured by Rutherford backscattering spectrometry (RBS). and the texture was determined by X-ray diffraction (XRD). Great improveme nts in hardness and adhesion behaviour were obtained when compared to TiN. Hardness results and adhesion behaviour as a, function of the Si content will be shown and discussed. The Ti0.85Si0.15N sample presente d the best results with a hardness value of about 36 GPa and a critica l load for total failure around 70 N. (C) 1998 Elsevier Science S.A.