STUDY OF DIAMOND-LIKE CARBON-FILMS FOR PROTECTIVE COATINGS

Interest in investigating thin films of diamond-like carbon (DLC, a-C: H has been motivated by the unique properties of this material and the demand of modern technologies. The development of low-temperature met hods (T-s < 200 degrees C) for producing DLC films used as protective layers is of practical interest. In this work, a-C:H films were prepar ed by low-temperature deposition by using three methods: magnetron-spu ttering of a graphite target in argon (80%)-hydrogen (20%) atmosphere, magnetron sputtering of graphite target combined with plasma-stimulat ed. gas-phase deposition from a mixture of gases (10% CH4 + 90% Ar) an d rf decomposition of a mixtures of gases (10% CH4 + 90% Ar). A compre hensive investigation of the composition. structure, optical and elect rical properties of a-C:H films was performed from the standpoint of t he requirements that protective coatings for electrophotograhic inform ation carriers and stable protector for Ag-based optics must meet. The investigation of the composition and structure was performed by elast ic recoil detection (ERD), resonance nuclear reaction O-16 (alpha, alp ha) O-16 and Raman spectroscopy. The optical properties (the transpare ncy over a wide spectral range and the refractive index) were determin ed by means of IR-spectroscopy and ellipsometric measurements. It was shown that solid, diamond-like a-C:H films (DLC) can be obtained with low-temperature deposition. It was shown that a protective DLC coating increases the storage time in the air and the strength properties of the a-Se (or a-Se alloy) electrophotographic information carriers. It was determined that a protective DLC coating is an effective and stabl e protector for Ag-based optics from an attack of active sulfide. (C) 1998 Published by Elsevier Science S.A.