ANALYSIS OF SURFACE AND INTERFACE MODIFICATIONS OF THIN MULTILAYERED FILMS

An important requirement in film deposition is assessing the character istics of its surface and internal interfaces. Low angle, high resolut ion X-ray diffraction, X-ray reflectivity and surface Brillouin scatte ring are used to determine structure, layer thickness and roughness as well as film acoustic properties, thus providing a detailed, non dest ructive structural and mechanical characterization of the film. Multil ayered Au-Ta thin films consisting of alternating Ta and Au layers wer e evaporated on Si substrates, then bombarded by 190 keV Xe+ to induce atomic mixing and subsequent structure vitrification, X-ray measureme nts allow to determine film thickness, structure and microstructure. S urface Brillouin scattering gives information about the acoustic prope rties of the film. The presence of a critical softening trend of the p hase velocity of surface waves (Rayleigh and Sezawa) with increasing i rradiation dose is correlated with film alloying and subsequent amorph ization. (C) 1998 Elsevier Science S.A.