XPS INVESTIGATION OF BXNYCZ COATINGS DEPOSITED BY LASER-ASSISTED CHEMICAL-VAPOR-DEPOSITION

Some of the most interesting new materials are located in the boron-ca rbon-nitrogen composition triangle. Laser assisted chemical vapour dep osition (LCVD) using different gas phase precursors and processing con ditions yields BxNyCz coatings with varying crystallographic structure and stoichiometry. In this work we investigate the capabilities of th e X-ray photoelectron spectroscopy (XPS) technique for the characteris ation of BxNyCz films produced by LCVD from diburane, ethane and ammon ia or diborane and dimethylamine reactive atmospheres, using a continu ous wave CO2 laser. The XPS results are interpreted together with thos e obtained by glancing incidence X-ray diffraction and electron microp robe analysis in order to study the chemical bonds present in the coat ings. (C) 1998 Elsevier Science S.A.