J. Pola, POLYCARBOSILANE-BASED COATINGS BY LASER-INDUCED POLYMERIZATION OF SILENES IN THE GAS-PHASE, Surface & coatings technology, 101(1-3), 1998, pp. 408-410
Laser-induced decomposition of silacyclobutanes RnH2-nSiCH2CH2CH2, wit
h R=CH3, H2C=CH, Cl and HC=C and of 1.3-disilacyclobutane in the gas p
hase results in the very efficient deposition of polycarbosilanes or a
morphous Si/C/H films at an ambient temperature of substrate. (C) 1998
Elsevier Science S.A.