POLYCARBOSILANE-BASED COATINGS BY LASER-INDUCED POLYMERIZATION OF SILENES IN THE GAS-PHASE

Authors
Citation
J. Pola, POLYCARBOSILANE-BASED COATINGS BY LASER-INDUCED POLYMERIZATION OF SILENES IN THE GAS-PHASE, Surface & coatings technology, 101(1-3), 1998, pp. 408-410
Citations number
18
Categorie Soggetti
Materials Science, Coatings & Films
ISSN journal
02578972
Volume
101
Issue
1-3
Year of publication
1998
Pages
408 - 410
Database
ISI
SICI code
0257-8972(1998)101:1-3<408:PCBLPO>2.0.ZU;2-Y
Abstract
Laser-induced decomposition of silacyclobutanes RnH2-nSiCH2CH2CH2, wit h R=CH3, H2C=CH, Cl and HC=C and of 1.3-disilacyclobutane in the gas p hase results in the very efficient deposition of polycarbosilanes or a morphous Si/C/H films at an ambient temperature of substrate. (C) 1998 Elsevier Science S.A.