DRIVING-FORCE FOR FREE-CARBON INCORPORATION IN CHROMIUM CARBIDE FILMSPROCESSED BY MOCVD

Communication: The clean decomposition of suitably tailored precursors without contamination of the growing film, especially by carbon from organometallic precursors, is a key requirement for successful deposit ion by MOCVD. The dependence on deposition variables of the supersatur ation and the driving force for the deposition of free carbon in the C VD of chromium carbides is evaluated here. The approach allows the add ition of iso-supersaturation and iso-activity lines to the conventiona l stability or CVD diagrams.