LOW-TEMPERATURE GROWTH OF EPITAXIAL LA0.5SR0.5COO3 FILMS ON (100)SRTIO3 BY PULSED-LASER DEPOSITION

Perovskite conductive La0.5Sr0.5CoO3 (LSCO) thin films were grown in s itu on (100)SrTiO3 by pulsed laser deposition at 400, 450 and 500 degr ees C. Heterostructures of Pb(Zr0.54Ti0.46)O-3/LSCO and YBa2Cu3O7-x/LS CO were also prepared in situ on the same substrates, where the LSCO l ayers were deposited at 500 degrees C. All the films were characterize d structurally by X-ray diffraction in both Bragg-Brentano and four-ci rcle geometry. A cube-on-cube growth of the bilayers as well as the LS CO film grown at 500 degrees C confirmed that LSCO can be grown epitax ially on the lattice-matched single crystal substrate at a temperature as low as 500 degrees C, which is well compatible with existing Si pr ocess technology. (C) 1998 Elsevier Science S.A.