CHEMICAL-VAPOR-DEPOSITION OF BC2N FILMS AND THEIR LASER-INDUCED ETCHING WITH SF6

Thin BC2N films have been obtained by chemical vapour deposition (CVD) from BCl3 and CH3CN. The layers were two types according to their app earance: metallic and black. The differences in their morphology, stru cture and composition were studied by scanning electron microscopy, X- ray diffraction and X-ray photoelectron spectroscopy. Metallic BC2N fi lms were subjected to laser-induced etching with SF6 using copper brom ide vapour laser. The etch depths increased with the increase of laser power and SF6 pressure, and with the decrease of scanning speed. The maximum etch rate was 120 mu m s(-1) at 2 W laser power, 100 kPa SF6 a nd 400 mu m s(-1) scanning speed. (C) 1998 Elsevier Science S.A.