Diamond thin films were deposited using a cyclic growth/etch oxy-acety
lene process on tungsten substrates. Growth of SH polytype of diamond
was observed in the diamond thin films. Deposition of 8H polytype of d
iamond was found to be strongly dependent on the process parameters. T
wo different phases of tungsten carbide which were formed at the subst
rate/film interface were also identified by X-ray diffraction. Raman s
pectrum of these samples confirmed the presence of 8H polytype. (C) 19
98 Elsevier Science S.A.