PULSED-LASER DEPOSITION OF SOLID-SOLUTION FILMS USING SEGMENTED TARGETS

A new method for the growth of solid-solution thin films has been deve loped in which a pre-determined ratio of the components can be deposit ed by the controlled use of a single rotating target. This variable co mpositional control is achieved by altering the radial position of eit her the target, which incorporates wedge-shaped segments of the solid- solution components, or of the laser beam. The method was used to grow films of the solid solution KTa1-xNbxO3 for which the predicted and m easured values of the ferroelectric transition temperature far selecte d Ta/Nb ratios were in excellent agreement. This approach is generally applicable to solid-solution systems and is not restricted to ferroel ectric oxides. (C) 1998 Elsevier Science S.A.