FERROELECTRIC PROPERTIES OF CRYSTALLINE ORIENTED PB(ZR,TI)O-3 THIN-FILMS PREPARED BY SOL-GEL TECHNIQUE

Ferroelectric properties and reliability characteristics of (111) and (100) preferred tetragonal Pb(Zr0.2Ti0.8)O-3 (PZT) thin film capacitor s have been investigated as a function of top electrode thickness. The (111) preferred films exhibit better squareness of the hysteresis loo p with larger remanant polarization and coercive field than the (100) preferred films. Top electrode thickness dependence of switching polar ization can be explained by the compressive stress induced by the top electrode annealing. The film with thinner top electrode shows less in itial switching polarization, however, better endurance characteristic s due to enhancing partial switching region, (C) 1998 Elsevier Science S.A.