Room temperature operation of Nb/Nb oxide-based single-electron transi
stors (SETs) was successfully achieved and was reported in detail. Fir
st, the SETs were fabricated using a scanning probe microscope (SPM)-b
ased anodic oxidation technique and then the junction al ea was furthe
r reduced by thermal oxidation. Ultra-small tunnel junctions were easi
ly obtained by utilizing these two types of oxidation processes, and c
lear single-electron charging effects were observed through the Nb/Nb
oxide-based SETs at room temperature.