In order to understand the effects of plastic deformation and the inte
rfacial fracture energy on the peel strength, thickness of the metal l
ayer and the pretreatment conditions of polyimide were varied in the C
u/Cr polyimide system. The work expenditure during the peel test was e
stimated using the stress-strain curves of metal films, X-ray measurem
ents of the plastic strain in peeled films, and the elastoplastic beam
analysis. Results indicate that the peel strength is strongly affecte
d by the film thickness and the pretreatment condition in a synergisti
c way, and that the peel strength shows a maximum at an intermediate t
hickness level. The estimated work expenditure was close to measured p
eel strength for most of the cases, which indicates that the measured
peel strength is more a measure of the plastic deformation during the
peel test than a measure of the true interfacial fracture energy. (C)
1997 Acta Metallurgica Inc.