ON THE STRUCTURE AND COMPOSITION OF POLYCRYSTALLINE CARBON NITRIDE FILMS SYNTHESIZED BY REACTIVE RF MAGNETRON SPUTTERING

Polycrystalline beta-C3N4 films have been deposited on single-crystal KCl(100) substrates using reactive rf magnetron sputtering. The films have been characterized by transmission electron microscopy (TEM), X-r ay photoelectron spectroscopy (XPS) and atomic force microscopy. A lar ge number of grains are found distributed in various regions of the fi lm. The dimension of the largest grain is about 4 mu m. The film is co mposed mainly of C and N with a small amount of O. XPS data show N-bon ded to sp(3)-hybridized C with some surface oxidation. The N/C ratio i n the beta-C3N4 region is deduced to be 1.23-1.27, close to an expecte d stoichiometric value of 1.33. The TED-measured interplanar spacings suggest that the crystalline grains are hexagonal with lattice paramet ers of a = 6.30 Angstrom and c = 2.46 Angstrom. (C) 1998 Elsevier Scie nce B.V. All rights reserved.