We report the first high-power RF characterization of AlGaN HFET's fab
ricated on electrically insulating SIC substrates. A record total powe
r of 2.3 W at 10 GHz was measured from a 1280-mu m wide HFET at V-ds =
33 V. An excellent RF power density of 2.8 W/mm was measured on a 320
-mu m wide HFET. These values are a result of the high thermal conduct
ivity of SiC, relative to the typical substrate, sapphire.