The use of preferential etching and atomic force microscopy to measure
the refractive index profiles of optical fibres and silica waveguides
is discussed. The validity of the technique itself is investigated. S
everal types of fibres including an elliptical core fibre have been pr
ofiled and the results compared to the preform refractive index profil
es. Similarly, planar waveguides made by Plasma Enhanced Chemical Vapo
ur Deposition (PECVD) have been measured and the results correlated wi
th the fabrication process. The lateral resolution of this technique i
s of order a few nanometers.