DYNAMICS IN PULSED-LASER DEPOSITION OF CERAMICS - EXPERIMENTAL, THEORETICAL AND NUMERICAL-STUDIES

The dynamics in energy coupling, material removal, material transfer, and film growth are studied experimentally, theoretically and numerica lly for pulsed laser deposition of ceramics. Excimer laser radiation i s investigated as a function of laser parameters (fluence, repetition rate, beam geometry) and processing variables (pressure and compositio n of processing gas, target-substrate arrangement) in order to deposit thin ceramic (Al2O3, ZrO2, BaTiO3, PZT) films on Si and SrTiO3 substr ates including buffer layers. The laser parameters and processing vari ables achieve different vapor and/or plasma states represented in the type, number, momentum and energy of the ensembles of species generate d, which are used to deposit thin films with defined properties in vie w of electronic and optical applications.