Rb. Bergmann et al., NUCLEATION AND GROWTH OF CRYSTALLINE SILICON FILMS ON GLASS FOR SOLAR-CELLS, Physica status solidi. a, Applied research, 166(2), 1998, pp. 587-602
Understanding nucleation and growth of crystalline Si films on glass i
s of prime importance in order to tailor and optimize semiconductor pr
operties for electronic devices such as solar cells. Commercial glass
limits the maximum processing temperature of Si films to 600 degrees C
. Solid phase and laser crystallization, or a combination of both tech
niques, are thus primarily used to crystallize Si films on glass. Whil
e random nucleation and growth processes always result in the formatio
n of a lognormal size distribution, control of nucleation sites allows
one to determine the location of grain growth or even the crystallogr
aphic orientation of gains. Via sequential lateral solidification usin
g a copper vapor laser, rye obtain Si crystallites on glass of several
tens of mu m in length.