LASER-INDUCED CRYSTALLIZATION OF AMORPHOUS-SILICON FILMS ON GLASS FORTHIN-FILM SOLAR-CELLS

`Two different methods of laser induced crystallization for preparing large grained polycrystalline silicon thin films on glass are reported . The first one is a lateral epitactic crystallization process followi ng melting by an Ar+ laser. The second one is an explosive crystalliza tion process. Both methods lead to crystal grains of several 10 mu m i n size. The films, 200 to 500 nm thick, may be used as a seed layer fo r an epitactic thickening process leading to solar cells.