SILICON NANOPARTICLES EMBEDDED IN SIO2-FILMS WITH VISIBLE PHOTOLUMINESCENCE

Citation
T. Makimura et al., SILICON NANOPARTICLES EMBEDDED IN SIO2-FILMS WITH VISIBLE PHOTOLUMINESCENCE, Applied surface science, 129, 1998, pp. 388-392
Citations number
12
Categorie Soggetti
Physics, Applied","Physics, Condensed Matter","Chemistry Physical","Materials Science, Coatings & Films
Journal title
ISSN journal
01694332
Volume
129
Year of publication
1998
Pages
388 - 392
Database
ISI
SICI code
0169-4332(1998)129:<388:SNEISW>2.0.ZU;2-S
Abstract
Applying laser ablation technique, we have synthesized two types of Si O2 films that included nanometer-sized Si particles. One is synthesize d by alternative deposition of Si nanoparticle layers and SiO, lavers. The synthesized film exhibits red photoluminescence (PL) with a peak energy below 1.5 eV. The other is a SiO2 film in which Si nanocrystall ites precipitate. The films were synthesized by annealing at 1000 degr ees C of SiOx films which are formed by laser ablation in diluted O-2 gas. The films exhibit PL with peak energies of 1.5 eV, 2.2 eV and 2.7 eV. We find that there is a narrow range of composition for efficient 1.5-eV PL. (C) 1998 Elsevier Science B.V.