IN-SITU GROWTH OF FERROELECTRIC LEAD-ZIRCONATE-TITANATE THIN-FILMS ONSI SUBSTRATES BY PULSED ND-YAG LASER DEPOSITION

The growth of oriented crystalline PZT films on (111) Si substrates at different substrate temperatures is reported. By varying the laser fl uence and other deposition parameters we have been able to produce, in a single-step process, highly oriented PZT films with good piezoelect ric properties at much lower temperatures than reported in other PLD e xperiments. X-ray measurements and secondary ion mass spectroscopy, as well as piezoelectric measurements, are used to characterize the diff erent samples. Experimental evidence is presented that at high laser f luence (25 J/cm(2)) better properties for PLD films are obtained with lower substrate temperatures. (C) 1998 Elsevier Science B.V.