A specially designed and patented setup has been built up for Pulsed L
aser Deposition (PLD) of homogeneous YBa2Cu3O7-x (YBCO)-films on subst
rates as large as 7 x 20 cm(2). YBCO films have been deposited on smal
l substrates (SrTiO3, LaAlO3 and buffered polycrystalline YSZ). Their
structural and superconducting properties have been measured. The mean
values of the transition temperatures and the critical current densit
ies at T = 77 K and zero magnetic field on single crystal substrates a
re 90 K and 4.3 MA/cm(2), respectively. The YBCO films on buffered pol
ycrystalline YSZ substrates reach critical current densities up to 1.1
MA/cm(2) at T = 77 K and B = 0 T. (C) 1998 Elsevier Science B.V.