SYNTHESIS OF CARBON-FILMS USING PULSED-LASER DEPOSITION METHOD WITH FROZEN CH4 AND CO2 TARGETS

A novel pulsed laser deposition (PLD) process with frozen CH4 and/or C O2 is developed. Frozen CH4 and/or CO2 formed on the graphitic carbon (GC) target at 12 K, then co-ablated with the GC target, using a KrF e xcimer laser. The present method is effective in enhancing the dissoci ation of raw materials and suppressing the large splashing particles. The characteristics of the deposited carbon films depend on the target material and on the substrate temperature. Under the proper condition s. the films show the characteristics of diamond-like carbon in the Ra man spectrum. According to the high resolution transmission electron m icroscopy, these films contain nanometer-sized diamond embryos. (C) 19 98 Elsevier Science B.V.