The variation of local bonding as a function of nitrogen concentration
in plasma-assisted pulsed-laser deposited carbon nitride films has be
en systematically studied. Time-of-flight (TOF) mass spectroscopy and
electron energy loss spectroscopy (EELS) were combined to identify abl
ation conditions that produce highly sp(3)-hybridized diamond-like-car
bon (DLC) for typical carbon nitride growth pressures. EELS studies of
carbon nitride films grown using these optimal conditions demonstrate
that there is a structural transformation from similar to 70 to 0% sp
(3)-bonded carbon as the nitrogen concentration increases from 12 to 1
7%. Density measurements show that this transformation is accompanied
by a density decrease from 3.3 to 2.1 S/cm(3). Hartree-Fock and densit
y functional calculations on nitrogen substituted diamond clusters sho
w that there is a strong preference to form sp(2)-bonded carbon when t
he local nitrogen concentration is larger than 12 atomic percent. Thes
e experimental results and calculations suggest that amorphous carbon
nitride structures with highly sp(3)-hybridized carbon are unstable. (
C) 1998 Elsevier Science B.V.