LASER CLEANING OF SURFACE CONTAMINANTS

Laser cleaning effect can be produced on a surface using pulsed laser irradiation, with pulse duration typically 1 to 100 ns, fluence typica lly tens to hundreds of mJ/cm(2), and wavelengths typically in the 200 to 300 nm range. A thin liquid film can be used to enhance the remova l efficiency of small particulates; this is called 'steam laser cleani ng'. A manufacturing worthy tool that can provide both steam laser cle aning as well as dry laser cleaning is built and tested successfully. The basic mechanism of steam laser cleaning is studied. (C) 1998 Elsev ier Science B.V.