Laser cleaning effect can be produced on a surface using pulsed laser
irradiation, with pulse duration typically 1 to 100 ns, fluence typica
lly tens to hundreds of mJ/cm(2), and wavelengths typically in the 200
to 300 nm range. A thin liquid film can be used to enhance the remova
l efficiency of small particulates; this is called 'steam laser cleani
ng'. A manufacturing worthy tool that can provide both steam laser cle
aning as well as dry laser cleaning is built and tested successfully.
The basic mechanism of steam laser cleaning is studied. (C) 1998 Elsev
ier Science B.V.