EXCIMER-LASER MICROMACHINING AND REPLICATION OF 3D OPTICAL-SURFACES

We developed a new technique for the fabrication of three dimensional microstructures at low costs and in small quantities based on KrF exci mer laser micromachining and inverse replication. In contrast to other production schemes where some intermediate mold processes are necessa ry for the master generation, we utilized a specially prepared laser m achined master directly for replication. Thus, a reduction in cost and time consumption can be achieved. With this technique, we produced mi croprisms with individual dimensions of 300 mu m width and a height of up to 100 microns in an area of an overall size of 160 mm by 160 mm. It is possible to scale up and down the dimensions of the whole array as well as the individual structural elements both laterally and verti cally. (C) 1998 Elsevier Science B.V.