PLD FABRICATION OF A SOFT-X-RAY MULTILAYER MIRROR AND LPP REFLECTANCETEST

A soft X-ray mirror based on a molybdenum-silicon (Mo/Si) multilayer s tructure has been fabricated by the pulsed laser deposition (PLD) tech nique. The multilayer was designed to reflect at 196 Angstrom for norm al incidence operation. An iterative graphical procedure was used to c alculate the optimum periodic multilayer structure. The normal inciden ce reflectance of the multilayer was determined using a continuum sour ce of soft X-rays from a laser-produced plasma (LPP). The multilayer p eak reflectance was 7.3% at 190 Angstrom, with the magnitude of reflec tance consistent with an effective interfacial roughness within the st ructure equal to similar to 15 Angstrom. (C) 1998 Elsevier Science B.V .