SYSTEMATIC-ERRORS IN FIXED POLARIZER, ROTATING POLARIZER, SAMPLE, FIXED ANALYZER SPECTROSCOPIC ELLIPSOMETRY

A fixed polarizer, rotating polarizer, sample, fixed analyzer spectros copic ellipsometer has been developed. This configuration eliminates t he errors from the light source residual polarization and those from t he monochromator and detection system. Explicit expressions for system atic errors are presented. Starting from a general formalism, we deriv ed first-order expressions for the errors caused by azimuthal offsets and residual ellipticity introduced by imperfect polarizers and window s. It is shown that the calibration errors for the analyzer, the polar izer and the top zero error of the rotating polarizer may be eliminate d by the usual two zone procedure with the exception of the errors ori ginating from the imperfections of the cell windows. Comparison is mad e with measurement results. (C) 1998 Elsevier Science S.A.