INFLUENCE OF ROUGHNESS AND GRAIN DIMENSION ON THE OPTICAL FUNCTIONS OF POLYCRYSTALLINE SILICON FILMS

Authors
BORGHESI A TALLARIDA G AMORE G CAZZANIGA F QUEIROLO G ALESSANDRI M SASSELLA A
Citation
A. Borghesi et al., INFLUENCE OF ROUGHNESS AND GRAIN DIMENSION ON THE OPTICAL FUNCTIONS OF POLYCRYSTALLINE SILICON FILMS, Thin solid films, 313, 1998, pp. 243-247
Citations number
9
Categorie Soggetti
Physics, Applied","Material Science","Physics, Condensed Matter
Journal title
Thin solid films → ACNP
ISSN journal
00406090
Volume
313
Year of publication
1998
Pages
243 - 247
Database
ISI
SICI code
0040-6090(1998)313:<243:IORAGD>2.0.ZU;2-B
Abstract
A study of amorphous and polycrystalline silicon films deposited at di fferent temperatures is presented. The effect of surface roughness on the quality of the fits to the spectroscopic ellipsometry data is asse ssed through a comparison with complementary atomic force microscopy i mages. (C) 1998 Elsevier Science S.A.