A. Borghesi et al., INFLUENCE OF ROUGHNESS AND GRAIN DIMENSION ON THE OPTICAL FUNCTIONS OF POLYCRYSTALLINE SILICON FILMS, Thin solid films, 313, 1998, pp. 243-247
A study of amorphous and polycrystalline silicon films deposited at di
fferent temperatures is presented. The effect of surface roughness on
the quality of the fits to the spectroscopic ellipsometry data is asse
ssed through a comparison with complementary atomic force microscopy i
mages. (C) 1998 Elsevier Science S.A.