The effect of the optical anisotropy of the high temperature supercond
ucting compound YB2Cu3O7-x (YBCO) on spectroscopic ellipsometry (SE) m
easurements was studied. For this, the method of spectroscopic anisotr
opy micro-ellipsometry (SAME) was employed on c-axis- as well as on a,
b-axes-oriented YBCO single crystals. SAME measures the ellipsometric
parameters Delta and Psi as a function of the angle alpha which descri
bes sample rotation around the surface normal. The analysis of the res
ulting Delta(alpha) and Psi(alpha)-curves yielded the ordinary and ave
raged extraordinary complex refractive indices in the UV-VIS range. Ad
ditionally, the crystallographic orientation angle phi between the opt
ical axis and the surface normal could be determined. The single cryst
al results were applied to SE measurements performed on differently or
iented YBCO thin films which were prepared by ion beam sputter deposit
ion on top of (100) SrTiO3 substrates. It is shown that SE allows for
in-situ monitoring of the crystallographic orientation of thin YBCO fi
lms. (C) 1998 Elsevier Science S.A.