IR ELLIPSOMETRY STUDIES OF POLYMERS AND OXYGEN PLASMA-TREATED POLYMERS

An infrared variable angle spectroscopic ellipsometer (IR-VASE) was us ed to study organic polymers in the infrared (2.5-14 mu m wavelength) spectral region. For the analysis of thin film polymers IR spectroscop ic ellipsometry has greater sensitivity over traditional FTIR spectros copy providing an exciting way to characterize these materials optical ly. The IR-VASE used in this study is of high accuracy, rotating polar izer, rotating compensator ellipsometer that uses an FTIR spectrometer as a light source. The IR-VASE was used to measure the infrared optic al constants of various polymers in both solid and liquid form. These optical constants were then used to model the percentage of water in a thin film of gelatin and the percentage of residual solvent in a thin film of silicons. In addition, the IR-VASE provided a sensitive measu rement of silicone chemistry and chemical changes caused by exposure t o an oxygen plasma. (C) 1998 Elsevier Science S.A.