EFFECT OF COMBINATIONAL DOPING ON X-RAY-SENSITIVITY OF A-SE FILMS

The x-ray sensitivity of a-Se films (similar to 130 mu m) as a functio n of combinational doping, i.e. chlorine (similar to 5 to 40 ppm) and arsenic (similar to 0.15 to 0.35%, by weight) has been studied using t he potential decay technique. The films doped combinationally with sim ilar to 30 ppm chlorine and similar to 0.30% arsenic show the maximum sensitivity. This has been attributed to the optimum combinational and complementary roles played by the two dopants, i.e. the mobility enha ncement role of chlorine and charge sustaining role of arsenic.