INTEGRATED MICRO-OPTOMECHANICAL LASER-BEAM DEFLECTOR

A laser beam microdeflector which is Fully integrated on a silicon sub strate is presented. The design combines a steering system of cylindri cal microlenses and a set of electrostatic combs. Both mechanical and optical parts are etched into a silica layer to provide a simple techn ological process and widen the operational wavelength range. Furthermo re, the design, associated with silicon surface micromachining technol ogy, enables more than 700 chips to be produced on a 100mm diameter wa fer.