SYNTHESIS OF METAL-OXIDE THIN-FILMS BY LIQUID-PHASE DEPOSITION METHOD

A novel wet process to synthesize metal oxide thin films has been deve loped. The process is called the Liquid-Phase Deposition (LPD) method. In this method, metal oxide or hydroxide thin films are formed on the substrate through the ligand-exchanging (hydrolysis) equilibrium reac tion of metal-fluoro complex species and the F- consumption reaction o f a F- scavenger. The LPD method is a unique soft solution process, an d is performed by very simple procedures, In this paper, we develop a method of preparing composite oxide thin films, Pt-dispersed titanium oxide, and iron-nickel binary oxide thin films.