ROLE OF OZONE IN REACTIVE COEVAPORATION OF LEAD-ZIRCONATE-TITANATE THIN-FILMS

The role of ozone in the reactive coevaporation of the lead zirconate titanate thin film was investigated by depositing films at various gro wth rates with various ozone fluxes or molecular oxygen fluxes on unhe ated substrates and then crystallizing them using rapid thermal anneal ing. The oxidation state of lead in the as-deposited film was determin ed from the ratio of the ozone to the total metal fluxes. The amount o f atomic oxygen supplied to the surface of the film was at least 10(3) times larger when the deposition was done using ozone rather than mol ecular oxygen. When the ozone flux was more than one-third of the tota l metal flux, well-oxidized films were obtained. To ensure obtaining w ell-oxidized film, the ozone flax should be more than twice as much.